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All-Metal Gas Filter UCS Series *UCS Series was discontinued manufacture in October 2008.

Pureron all-metal gas filter "UCS series" is compact and high efficiency gas filter for ULSI production with high accuracy filtration very much superior in degas characteristic.

  • SUS316L stainless steel used for every material
  • Out gas free
  • High accuracy filtration 0.01μm
  • High heat resistance 460°C
  • Wide range of models from low flow rate 10L/min to 80L/min available
  • Baking and special cleansing process applied for all products
  • Standard specification: baking, purified water special cleansing, metal cap attached
Filtration Accuracy 0.01μm
Recommended Flow Rate10 to 80ℓ/min(refer to flow rate characteristic curve for each model)
Max. Operating Pressure20.6MPa(2,987PSIG) at20℃
Max. Allowable Differential Pressure15MPa(2,175PSIG) at20℃
Max. Operating Temperature460℃
External Leakage2×10-11Pa・m3/sec or less
MaterialsHousing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.7μm or less
Joint1/4”, 3/8”, 1/2” VCR®, Swagelok®, and others

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ModelA(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
UCS-CB-02VR15.5 25.0 Hex.171/4 φ27 65.0
UCS-CB-02SW10.025.0Hex.171/4φ27 54.0
UCS-SB-02VR 19.5 53.0 Hex.27 3/8 φ30 84.0
UCS-SB-02SW 12.0 53.0 Hex.273/8 φ30 73.0
UCS-MB-02VR15.5 96.0 Hex.271/4φ30 127.0
UCS-MB-02SW 10.0 96.0 Hex.271/4φ30 116.0

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