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All-Metal Gas Filter UCS Series *UCS Series was discontinued manufacture in October 2008.
Pureron all-metal gas filter "UCS series" is compact and high efficiency gas filter for ULSI production with high accuracy filtration very much superior in degas characteristic.
- SUS316L stainless steel used for every material
- Out gas free
- High accuracy filtration 0.01μm
- High heat resistance 460°C
- Wide range of models from low flow rate 10L/min to 80L/min available
- Baking and special cleansing process applied for all products
- Standard specification: baking, purified water special cleansing, metal cap attached
| Filtration Accuracy | 0.01μm |
|---|---|
| Recommended Flow Rate | 10 to 80ℓ/min(refer to flow rate characteristic curve for each model) |
| Max. Operating Pressure | 20.6MPa(2,987PSIG) at20℃ |
| Max. Allowable Differential Pressure | 15MPa(2,175PSIG) at20℃ |
| Max. Operating Temperature | 460℃ |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.7μm or less |
| Joint | 1/4”, 3/8”, 1/2” VCR®, Swagelok®, and others |
| Model | A(mm) | B(mm) | D(mm) | E(inch) | F(mm) | H(mm) |
|---|---|---|---|---|---|---|
| UCS-CB-02VR | 15.5 | 25.0 | Hex.17 | 1/4 | φ27 | 65.0 |
| UCS-CB-02SW | 10.0 | 25.0 | Hex.17 | 1/4 | φ27 | 54.0 |
| UCS-SB-02VR | 19.5 | 53.0 | Hex.27 | 3/8 | φ30 | 84.0 |
| UCS-SB-02SW | 12.0 | 53.0 | Hex.27 | 3/8 | φ30 | 73.0 |
| UCS-MB-02VR | 15.5 | 96.0 | Hex.27 | 1/4 | φ30 | 127.0 |
| UCS-MB-02SW | 10.0 | 96.0 | Hex.27 | 1/4 | φ30 | 116.0 |
