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High Accuracy Filtration All-Metal Gas Filter UCS-M Series
- SUS316L stainless steel used for every part
- High cleansing level: Internal special cleansing and high temperature baking with high purity N2 gas for all products before shipment.
- High efficiency particle removal of 0.003μm or more under high flow rate and high differential pressure.
- High heat resistance 460°C
- Wide range of models available from low flow rate about 10L/min to medium flow rate about 250L/min.
- Low pressure loss: Extremely lower pressure loss and compact size compared with conventional metal filter realizing high gas flow rate.
| Filtration Accuracy | 0.003μm |
|---|---|
| Recommended Flow Rate | 10M…15ℓ/min,13M…60ℓ/min,19M…120ℓ/min,24M…250ℓ/min |
| Max. Operating Pressure | 17MPa (2,465PSIG) at20℃ |
| Max. Allowable Differential Pressure | 15MPa(2,175PSIG) at20℃ |
| Max. Operating Temperature | 460℃(inert gas) |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.5μm or less |
| Standard Specification | Baking, purity special cleansing (inside of filter) |
| Joint | 1/4”, 3/8”, 1/2” VCR®, Swagelok®, and others |
| Model | A(mm) | B(mm) | D(mm) | E(inch) | F(mm) | H(mm) |
|---|---|---|---|---|---|---|
| UCS-10M(13M)-02VR | 15.5 | 53.0 | Hex.27 | 1/4 | φ30.0 | 84.0 |
| UCS-10M(13M)-02SW | 10.0 | 53.0 | Hex.27 | 1/4 | φ30.0 | 73.0 |
| UCS-19M-02VR | 19.5 | 96.0 | Hex.30 | 3/8 | φ32.5 | 127.0 |
| UCS-19M-02SW | 12.0 | 96.0 | Hex.30 | 3/8 | φ32.5 | 116.0 |
| UCS-24M-02VR | 15.5 | 98.0 | Hex.37 | 1/4 | φ41.0 | 129.0 |
| UCS-24M-02SW | 10.0 | 98.0 | Hex.37 | 1/4 | φ41.0 | 118.0 |
