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High Accuracy Filtration All-Metal Gas Filter UCS-M Series

  • SUS316L stainless steel used for every part
  • High cleansing level: Internal special cleansing and high temperature baking with high purity N2 gas for all products before shipment.
  • High efficiency particle removal of 0.003μm or more under high flow rate and high differential pressure.
  • High heat resistance 460°C
  • Wide range of models available from low flow rate about 10L/min to medium flow rate about 250L/min.
  • Low pressure loss: Extremely lower pressure loss and compact size compared with conventional metal filter realizing high gas flow rate.
Filtration Accuracy0.003μm
Recommended Flow Rate10M…15ℓ/min,13M…60ℓ/min,19M…120ℓ/min,24M…250ℓ/min
Max. Operating Pressure17MPa (2,465PSIG) at20℃
Max. Allowable Differential Pressure15MPa(2,175PSIG) at20℃
Max. Operating Temperature460℃(inert gas)
External Leakage2×10-11Pa・m3/sec or less
MaterialsHousing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.5μm or less
Standard Specification Baking, purity special cleansing (inside of filter)
Joint1/4”, 3/8”, 1/2” Gasket seal, Compression seal, and others

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ModelA(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
UCS-10M(13M)-02VR15.5 53.0 Hex.27 1/4 φ30.0 84.0
UCS-10M(13M)-02SW10.053.0 Hex.27 1/4φ30.0 73.0
UCS-19M-02VR 19.5 96.0 Hex.30 3/8 φ32.5 127.0
UCS-19M-02SW 12.0 96.0 Hex.30 3/8 φ32.5 116.0
UCS-24M-02VR15.5 98.0 Hex.37 1/4 φ41.0 129.0
UCS-24M-02SW 10.0 98.0 Hex.37 1/4φ41.0 118.0

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