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Ceramic Gas Filter with HASTELLOY ® C-22 Housing for Corrosive Special Gas UCH Series

  • High Corrosion Resistance
    HASTELLOY ® C-22 is used for housing and ceramic for filter element. These elements have very high corrosion resistance against halogen series, such as HBr or HCl, reactive corrosive special gases and provide good performance.
  • Low Degas Characteristic
    Ceramic filter is suited for special gas applications such as corrosive or high reactive gases compared with stainless steel SUS316L filter due to its remarkably lower water absorption. Every filter is shipped after special cleansing by purified water and baking to perform superior degas characteristic.
  • High Accuracy Filtration: 0.003μm
    High accuracy filtration is achieved by multilayered ceramic element. Zero particle count of 0.003μm is checked by CNC counter for all products before shipment.
Filtration Accuracy 0.003μm
Recommended Flow Rate40 to 200ℓ/min(refer to flow rate characteristic curve for each model)
Max. Operating Pressure17MPa (2,465PSIG) at20℃
Max. Allowable Differential Pressure9.6MPa (1,392PSIG) at20℃
Max. Continuous Operating Temperature120℃
Baking Temperature200℃
External Leakage2×10-11Pa・m3/sec or less
MaterialsHousing: HASTELLOY ® C-22 Roughness:Rmax0.7μm or less Element: Alumina ceramics(Al2O3) Seal: PTFE
Joint 1/4",3/8",1/2",3/4" Gasket seal, Compression seal, and others

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ModelA(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
UCH-2-02VR15.5 84.0 Hex.24 1/4 φ42.4 130.0
UCH-2-02SW 10.0 84.0 Hex.24 1/4φ42.4 119.0
UCH-2-03VR15.5 92.0 Hex.24 1/4φ42.4 146.0
UCH-2-03SW10.0 92.0 Hex.24 1/4φ42.4 131.0
UCH-3-02VR15.5 46.0 Hex.24 1/4φ42.4 84.0
UCH-3-02SW10.0 46.0 Hex.24 1/4φ42.4 73.0
UCH-3-03VR15.5 48.4 Hex.24 1/4φ42.4 112.0
UCH-4-02VR10.0 229.0 Hex.24 1/4φ42.4 274.0
UCH-4-03VR15.5 230.0 Hex.24 1/4φ42.4 284.0

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