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Low Pressure Loss Inline Ceramic Gas Filter UCF Series
- Low Pressure Loss
Extremely low pressure is realized, OUT side pressure of ∆P at 0.01MPa against IN side pressure of 0.1MPa at 10L/min nitrogen gas flow. - High Accuracy Filtration
0.01μ particle removal efficiency is 99.9999999999%, contributing to significant improvement for extraction rate in sub micron ULSI production.
| Filtration Accuracy | 0.01μm |
|---|---|
| Recommended Flow Rate | 10 to 160ℓ/min(refer to flow rate characteristic curve for each model) |
| Max. Operating Pressure | 17MPa (2,465PSIG) at20℃ |
| Max. Allowable Differential Pressure | 3MPa (435PSIG) at20℃ |
| Max. Continuous Operating Temperature | 120℃ |
| Baking Temperature | 200℃ |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing:SUS316L Roughness:Rmax0.7μm Element: Alumina ceramics(Al2O3) Seal: PTFE |
| Joint | 1/4”, 3/8”, 1/2” VCR®, Swagelok®, and others |
| Model | A(mm) | B(mm) | D(mm) | E(inch) | F(mm) | H(mm) |
|---|---|---|---|---|---|---|
| UCF-CB-02VR・P | 15.5 | 40.0 | Hex.30 | 1/4 | φ32.5 | 71.0 |
| UCF-CB-02SW・P | 10.0 | 40.0 | Hex.30 | 1/4 | φ32.5 | 60.0 |
| UCF-SB-02VR・P | 15.5 | 53.0 | Hex.30 | 1/4 | φ32.5 | 84.0 |
| UCF-SB-02SW・P | 10.0 | 53.0 | Hex.30 | 1/4 | φ32.5 | 73.0 |
| UCF-LB-02VR・P | 15.5 | 96.0 | Hex.30 | 1/4 | φ32.5 | 127.0 |
| UCF-LB-02SW・P | 10.0 | 96.0 | Hex.30 | 1/4 | φ32.5 | 116.0 |
| UCF-SC-02VR・P | 15.5 | 53.0 | Hex.30 | 1/4 | φ32.5 | 84.0 |
| UCF-SC-02SW・P | 10.0 | 53.0 | Hex.30 | 1/4 | φ32.5 | 73.0 |
| UCF-LC-02VR・P | 15.5 | 96.0 | Hex.30 | 1/4 | φ32.5 | 127.0 |
| UCF-LC-02SW・P | 10.0 | 96.0 | Hex.30 | 1/4 | φ32.5 | 116.0 |
