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Low Pressure Loss Inline Ceramic Gas Filter UCF Series

  • Low Pressure Loss
    Extremely low pressure is realized, OUT side pressure of ∆P at 0.01MPa against IN side pressure of 0.1MPa at 10L/min nitrogen gas flow.
  • High Accuracy Filtration
    0.01μ particle removal efficiency is 99.9999999999%, contributing to significant improvement for extraction rate in sub micron ULSI production.
Filtration Accuracy 0.01μm
Recommended Flow Rate 10 to 160ℓ/min(refer to flow rate characteristic curve for each model)
Max. Operating Pressure17MPa (2,465PSIG) at20℃
Max. Allowable Differential Pressure 3MPa (435PSIG) at20℃
Max. Continuous Operating Temperature120℃
Baking Temperature200℃
External Leakage2×10-11Pa・m3/sec or less
MaterialsHousing:SUS316L Roughness:Rmax0.7μm Element: Alumina ceramics(Al2O3) Seal: PTFE
Joint 1/4”, 3/8”, 1/2” Gasket seal, Compression seal, and others

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ModelA(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
UCF-CB-02VR・P15.5 40.0 Hex.301/4 φ32.5 71.0
UCF-CB-02SW・P 10.0 40.0Hex.301/4φ32.5 60.0
UCF-SB-02VR・P15.5 53.0Hex.301/4φ32.5 84.0
UCF-SB-02SW・P10.0 53.0Hex.301/4φ32.5 73.0
UCF-LB-02VR・P15.5 96.0Hex.301/4φ32.5 127.0
UCF-LB-02SW・P10.0 96.0Hex.301/4φ32.5 116.0
UCF-SC-02VR・P15.553.0Hex.301/4φ32.584.0
UCF-SC-02SW・P10.0 53.0Hex.301/4φ32.573.0
UCF-LC-02VR・P15.596.0Hex.301/4φ32.5127.0
UCF-LC-02SW・P10.0 96.0Hex.301/4φ32.5116.0

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