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Low Pressure Loss Metal Gas Filter UCD Series
- SUS316L used for constructional material of filter, realizing high heat resistance with little possibility of corrosion or secondary material generation.
- Out side pressure loss of ∆0.05MPa when 0.2MPa nitrogen gas (N2) flow pressure applied on IN side realizing 90SLM flow rate.
- Filtration accuracy 0.003μm checked by CNC counter under constant and pulsation flows realizing significant improvement in yield in sub micron ULSI production.
| Filtration Accuracy | 0.003μm |
|---|---|
| Recommended Flow Rate | 10 to 100ℓ/min(refer to flow rate characteristic curve for each model) |
| Max. Operating Pressure | 0.98MPa(142PSIG) at20℃ |
| Max. Allowable Differential Pressure | 0.7MPa(101.5PSIG) at20℃ |
| Max. Operating Temperature | 460℃ |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.7μm or less |
| Joint | 1/4" VCR®, and others |
