Minimal Flow Rate Ultra Compact Ceramic Gas Filter SPC Series

- Ultra Small / Light Weight
The SPC series is designed ultra compact (Ф21 x 84mm) and light weight (90g) suitable for small space applications in cylinder cabinet and equipment. - High Filtration Accuracy
High accuracy filtration is achieved by multilayered ceramic element. Zero particle count of 0.003μm is checked by CNC counter for all products before shipment. Low Degas Characteristic - Low Degas Characteristic
Pollution by degas, mainly water from inner wall of filter is causing problems in minimal gas flow and pressure processes. Ceramic filter offers superior degas characteristics compared with all-metal filter due to remarkably lower water absorption. - Dead Space Free
Minimized gas residual space provides better gas replacement performance.
| Filtration Accuracy | 0.003μm |
|---|---|
| Recommended Flow Rate | 10ℓ/min |
| Max. Operating Pressure | 17MPa (2,465PSIG) at20℃ |
| Max. Allowable Differential Pressure | 3MPa (435PSIG) at20℃ |
| Max. Continuous Operating Temperature | 120℃ |
| Baking Temperature | 200℃ |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing:SUS316L(Electrochemical polishing) Roughness:Rmax0.7μm or less Element: Alumina ceramics(Al2O3) Seal: PTFE |
| Joint | 1/4”VCR®, Swagelok®, and others |



