Japanese 
English
Chinese 
Korean 
All Metal Gas Filter for Rough Filtration RGF Series
- Filtration Accuracy in Wide Range
Wide filtration accuracy range from 0.1 to 10μm under constant and pulsation flows. - High Corrosion Resistance
No corrosive material used for constructional material of filter to avoid corrosion or secondary product generation. - Degas Characteristic
APIMS degas measurement (amount of water) at 1.2ppb achieved with use of dedicated baking heater. Measurement at 0.1ppb level also achievable by continuous use of heater. Degas characteristic improved furthermore by removing impurity residue in filter by special cleansing.
| Filtration Accuracy | 0.1, 0.5, 1.0, 5.0 and 10μm are available |
|---|---|
| Recommended Flow Rate | Size between plates: E size…40L/min, T size…60L/min |
| Max. Operating Pressure | 17MPa (2,465PSIG) at20℃ |
| Max. Allowable Differential Pressure | 2MPa(290PSIG) at20℃ |
| Max. Operating Temperature | 400℃ |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Materials | Housing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.7μm or less |
| Joint | 1/4”, 3/8”, 1/2” VCR®, Swagelok®, and others |
| Model | A(mm) | B(mm) | D(mm) | E(inch) | F(mm) | H(mm) |
|---|---|---|---|---|---|---|
| RGF-EB-02VR | 15.5 | 34.0 | Hex.30 | 1/4 | φ32.5 | 65.0 |
| RGF-EB-02SW | 10.0 | 35.0 | Hex.30 | 1/4 | φ32.5 | 55.0 |
| RGF-TB-02VR | 19.5 | 53.0 | Hex.30 | 1/4 | φ32.5 | 84.0 |
| RGF-TB-02SW | 12.0 | 53.0 | Hex.30 | 1/4 | φ32.5 | 730 |
