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All Metal Gas Filter for Rough Filtration RGF Series

  • Filtration Accuracy in Wide Range
    Wide filtration accuracy range from 0.1 to 10μm under constant and pulsation flows.
  • High Corrosion Resistance
    No corrosive material used for constructional material of filter to avoid corrosion or secondary product generation.
  • Degas Characteristic
    APIMS degas measurement (amount of water) at 1.2ppb achieved with use of dedicated baking heater. Measurement at 0.1ppb level also achievable by continuous use of heater. Degas characteristic improved furthermore by removing impurity residue in filter by special cleansing.
Filtration Accuracy0.1, 0.5, 1.0, 5.0 and 10μm are available
Recommended Flow RateSize between plates: E size…40L/min, T size…60L/min
Max. Operating Pressure17MPa (2,465PSIG) at20℃
Max. Allowable Differential Pressure2MPa(290PSIG) at20℃
Max. Operating Temperature400℃
External Leakage2×10-11Pa・m3/sec or less
MaterialsHousing: SUS316L (Electrochemical polishing) Element: SUS316L Roughness:Rmax0.7μm or less
Joint1/4”, 3/8”, 1/2” Gasket seal, Compression seal, and others

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ModelA(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
RGF-EB-02VR15.5 34.0 Hex.30 1/4 φ32.5 65.0
RGF-EB-02SW10.0 35.0 Hex.30 1/4φ32.5 55.0
RGF-TB-02VR 19.5 53.0 Hex.30 1/4 φ32.5 84.0
RGF-TB-02SW 12.0 53.0 Hex.30 1/4 φ32.5 730

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