PURERON JAPAN sells Hybrid Filter.

Hybrid Filter PGH Series

• About hybrid filter
  It becomes hybrid by using the inline gas filter with the high accuracy gasket type gas filters (inlet and outlet).
  This hybrid filter helps to extend the life time of the inline gas filter and the mass flow controller(MFC) ,and prevents the seal damage of a metal seal valve caused the leakage by removing the rough particle such as more than 0.3 micro meter or 1 micro meter
  
    The filter media is made of 316L stainless steel.
    The gasket is made of 316L stainless steel or Nickel.
    It can handle the hybrid filter as a face seal, so it is no need extra work
    (cutting/welding for line gas filter installing).