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Inline Ceramic gas Filter PGF Series

  • High Accuracy Filtration
    For sub micron LSI processes, it is indispensable to supply high purity process gas to use point. Ultra clean piping was also a major concern for this purpose. To cope with such requirements, Pureron Japan has developed completely new filters using ceramic as filtering element and achieved 0.003μm high accuracy filtration under stable condition.
  • High Selectivity Indispensable for Etching and Thin Film
    Removal of impurity such as water and oxygen is very important seeking for high selectivity. High temperature baking is indispensable in order to surely remove impurity. Pureron Japan’s ceramic filter has been developed from this viewpoint and high temperature baking at 200°C is possible.
  • Cost Reduction by Maintenance-Free Operations
    Trilaminar filtration structure, depending on size of particle diameter, rarely generates clogging. Ceramic filter also offers superior durability and heat resistance compared with conventional filter. Consequently, little loss caused by down time of production realizes cost reduction in long term.
Filtration Accuracy 0.003μm(however, it is 0.1μm at purified water filtration)
Recommended Flow Rate10 to 200ℓ/min(refer to flow rate characteristic curve for each model)
Max. Operating Pressure17MPa (2,465PSIG) at20℃
Max. Allowable Differential Pressure9.6MPa (1,392PSIG) at20℃
Max. Continuous Operating Temperature120℃
Baking Temperature200℃
External Leakage Amount 2×10-11Pa・m3/sec or less
MaterialsHousing:SUS316L Roughness:Rmax0.7μm or less Element: Alumina ceramics (Al2O3) Seal: PTFE
Joint1/4",3/8",1/2",3/4" Gasket seal, Compression seal ,and others

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Model A(mm)B(mm) D(mm) E(inch) F(mm) H(mm)
PGF-2-02VR・PC0715.584.0Hex.241/4φ42.4130.0
PGF-2-02SW・PC0710.084.0Hex.241/4φ42.4 119.0
PGF-2-03VR・PC07 19.5 92.0 Hex.24 3/8 φ42.4 146.0
PGF-2-03SW・PC07 12.0 92.0 Hex.243/8 φ42.4 131.0
PGF-3-02VR・PC0715.5 46.0 Hex.241/4φ42.4 84.0
PGF-3-02SW・PC07 10.0 46.0 Hex.241/4φ42.4 73.0
PGF-3-03VR・PC07 19.0 48.4 Hex.243/8 φ42.4 112.0
PGF-4-02VR・PC0715.5 229.0 Hex.241/4φ42.4 274.0
PGF-4-03VR・PC0719.0 229.0 Hex.243/8 φ42.4 284.0
PGF-5-02VR・PC0715.5 53.0 Hex.30 1/4 φ32.5 84.0
PGF-5-02SW・PC0710.0 53.0 Hex.30 1/4φ32.5 73.0

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  • Filter baking: 200°C, 2 hours
  • Metal cap
  • For ultra large flow rate 500 to 3,000L/min, PGF-11 type is available.

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