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High Flow Rate Ceramic Gas Filter PGF-11 Series

  • Ultra High Flow Rate
    Suitable for flow rate from 500L/min to 3,000L/min at primary side bulk gas line.
  • High Accuracy Filtration
    Ceramic element with high accuracy filtration of 0.003μm is durable against pulsation, rarely generates clogging so periodical maintenance is hardly necessary.
  • High Efficiency
    With dedicated 200°C baking heater (option), degas element such as water or oxygen can be reduced to a few ppb or less.
Filtration Accuracy0.003μm
Usable FluidN2,O2,Ar(Bulk Gas)
Recommended Flow Rate500 to 3,000 ℓ/min(60 to 80ｍ3/Hr)
Withstanding Pressure0.97MPa(140PSIG) at20℃
Max. Operating Pressure0.97MPa(140PSIG) at20℃
Pressure Loss Design0.05MPa(7.25PSIG) at20℃
Operating Temperature5 to 120℃
Baking Temperature180℃ max
Gas Contacting MaterialSUS316L (inner face electrochemical polishing), alumina, Viton ®, PTFE
Joint1/2”, 3/4”VCR®, and others

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PGF-11-04VR

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