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Ultra High Purity Compact Gas Purifier GP/GPF Series
- Use point impurity such as water, oxygen and hydrocarbon included in inactive or special gas removed down to 1PPB or less under certain conditions.
- SUS316L used as standard material for rough filtration media not generating particle by corrosion or chemical reaction.
- Water included in high corrosion special gas such as HBr and HCI removed up to 100PPB (detection limit of analysis equipment) or less under certain conditions.
- Same small size and light weight GP-05 as filter with 84mm face-to-face dimension and 120g in weight.
- Usable until complete lifetime by reactivation process by baking at 350°C to 400°C depending on gas type.
| Refining Performance | Each impurity: max. 1PPB or less Total of impurity on outlet side: max. 10PPB or less (depending on the condition) ) |
|---|---|
| Material | Housing: SUS316L electrochemical polishing R max 0.7μm or less, Filter media: SUS316L, Refining agent: metal getter etc. |
| Flow Rate Range | 0.5LPM to 20LPM (varies depending on model / pressure condition) |
| Max. Operating Pressure | 0.97MPa(140.65PSIG) |
| Operating Temperature | Room temperature or 350 to 400°C (varies depending on the application)) |
| External Leakage | 2×10-11Pa・m3/sec or less |
| Joint | 1/4",3/8" VCR®,Swagelok® |
| Model | A(mm) | B(mm) | C(mm) | Recommended Flow Rate(ℓ/min) | Lifetime (Flow Rate)* |
|---|---|---|---|---|---|
| GP-05 | 84 | 38 | 25 | 0.1 to 0.5 | Approximately one year (at 0.2LPM) |
| GP- 1 | 84 | 38 | 38 | 0.1 to 1.0 | Approximately one year (at 0.5LPM) |
| GP- 2 | 122 | 76 | 38 | 0.2 to 2.0 | Approximately one year (at 1LPM) |
| GP- 5 | 160 | 114 | 51 | 1 to 5 | Approximately one year (at 3LPM) |
| GP-10 | 224 | 178 | 51 | 2 to 10 | Approximately one year (at 5LPM) |
| GP-20 | 317 | 272 | 63 | 5 to 20 | Approximately one year (at 10LPM) |
* Breakthrough above is when total impurity from inlet port (primary side) is assumed to be 10PPM, and reactivation process is required during this period.
| Specification | Gas to be Refined | Refined Impurity | Guaranteed Refining Value | |
|---|---|---|---|---|
| Inactive Gas | He, Ne, Ar, Kr, Xe | H2O，O2，CO2 | 1 PPB or less (at room temperature) | |
| H2O，O2，CO，CO2，N2，THC | 1 PPB or less (at heating) | |||
| Total of impurity on outlet (secondary) side | 10 PPB or less ( 8LOGS ) | |||
| For Nitrogen Gas | N2 | H2O，O2，CO2 | 1 PPB or less (at room temperature) | |
| H2O，O2，CO，CO2，THC | 1 PPB or less (at heating) | |||
| For Hydrogen Gas | H2，Ar/H2，N2/H2 | H2O，O2，CO2 | 1 PPB or less(at room temperature) | |
| H2O，O2，CO，CO2，N2，THC | 1 PPB or less (at heating) | |||
| For Hydroid Gas For Freon Gas |
SiH4，Si2H6，SiH2Cl2，AsH3，PH3，NH3，B2H6，H2SH2Se，GeH4，Ge2H6，CH4，CF4，CCl4，SF6 | H2O，O2，CO2 | 10 PPB or less(at room temperature) | |
| For Oxygen Gas (For oxygen gas purifier, single type and dual type are prepared.) | O2，Air | Single | H2O | 100 PPB or less(at room temperature) |
| CO2 | 10 PPB or less(at room temperature) | |||
| dual | H2O | 100 PPB or less(at heating) | ||
| H2，CO，CO2 | 10 PPB or less(at heating) | |||
| For Corrosive Gas | HBr, HCl, BCl3，BF3，Cl2 | H2O | 100 PPB or less(at room temperature) | |
* For the purity analysis of corrosive gas, FT-IR was used (detection limit 100PPB).
* Guaranteed values above are when total of impurity on inlet side is 10PPM or less
