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Ultra High Purity Compact Gas Purifier GP/GPF Series

  • Use point impurity such as water, oxygen and hydrocarbon included in inactive or special gas removed down to 1PPB or less under certain conditions.
  • SUS316L used as standard material for rough filtration media not generating particle by corrosion or chemical reaction.
  • Water included in high corrosion special gas such as HBr and HCI removed up to 100PPB (detection limit of analysis equipment) or less under certain conditions.
  • Same small size and light weight GP-05 as filter with 84mm face-to-face dimension and 120g in weight.
  • Usable until complete lifetime by reactivation process by baking at 350°C to 400°C depending on gas type.
Refining PerformanceEach impurity: max. 1PPB or less
Total of impurity on outlet side: max. 10PPB or less (depending on the condition) )
MaterialHousing: SUS316L electrochemical polishing R max 0.7μm or less, Filter media: SUS316L, Refining agent: metal getter etc.
Flow Rate Range 0.5LPM to 20LPM (varies depending on model / pressure condition)
Max. Operating Pressure0.97MPa(140.65PSIG)
Operating TemperatureRoom temperature or 350 to 400°C (varies depending on the application))
External Leakage2×10-11Pa・m3/sec or less
Joint1/4",3/8" Gasket seal, Compression seal

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ModelA(mm)B(mm)C(mm)Recommended Flow Rate(ℓ/min) Lifetime (Flow Rate)*
GP-05 84 38 250.1 to 0.5Approximately one year (at 0.2LPM)
GP- 1 84 38 380.1 to 1.0 Approximately one year (at 0.5LPM)
GP- 2 122 76 380.2 to 2.0 Approximately one year (at 1LPM)
GP- 5 160 114 511 to 5 Approximately one year (at 3LPM)
GP-10 224 178 512 to 10 Approximately one year (at 5LPM)
GP-20 317 272 635 to 20 Approximately one year (at 10LPM)

* Breakthrough above is when total impurity from inlet port (primary side) is assumed to be 10PPM, and reactivation process is required during this period.

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Specification Gas to be Refined Refined ImpurityGuaranteed Refining Value
Inactive Gas He, Ne, Ar, Kr, Xe H2O,O2,CO2 1 PPB or less (at room temperature)
H2O,O2,CO,CO2,N2,THC 1 PPB or less (at heating)
Total of impurity on outlet (secondary) side 10 PPB or less ( 8LOGS )
For Nitrogen Gas N2 H2O,O2,CO2 1 PPB or less (at room temperature)
H2O,O2,CO,CO2,THC 1 PPB or less (at heating)
For Hydrogen Gas H2,Ar/H2,N2/H2 H2O,O2,CO2 1 PPB or less(at room temperature)
H2O,O2,CO,CO2,N2,THC 1 PPB or less (at heating)
For Hydroid Gas
For Freon Gas
SiH4,Si2H6,SiH2Cl2,AsH3,PH3,NH3,B2H6,H2SH2Se,GeH4,Ge2H6,CH4,CF4,CCl4,SF6 H2O,O2,CO2 10 PPB or less(at room temperature)
For Oxygen Gas (For oxygen gas purifier, single type and dual type are prepared.) O2,Air Single H2O 100 PPB or less(at room temperature)
CO2 10 PPB or less(at room temperature)
dual H2O 100 PPB or less(at heating)
H2,CO,CO2 10 PPB or less(at heating)
For Corrosive Gas HBr, HCl, BCl3,BF3,Cl2 H2O 100 PPB or less(at room temperature)

* For the purity analysis of corrosive gas, FT-IR was used (detection limit 100PPB).
* Guaranteed values above are when total of impurity on inlet side is 10PPM or less

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