
Gas Filters for IGS FI/SI Series

- High Accuracy Filtration
Ceramic element types (0.003μm) with a reputation for high accuracy filtration and metal element types (0.003μm) lined up.
- Wide Variation
C- Seal / H1G-Seal / W- Seal types available (1.125 inch types are also available for C-seal and W-seal).
- Wide Flow Rate Range
Product line ups with flow rates from LPM level to 120LPM
| Seal Type | Recommended Flow Rate |
Element Material |
Filtration Accuracy |
1.5" Type |
1.125" Type |
| C-Seal |
10SLPM or less |
Alumina Ceramics |
0.003μm |
FIE-MB10C |
SIE-MB10C |
| 40SLPM or less |
Alumina Ceramics |
0.003μm |
FIE-SB19C |
SIE-SB19C |
| 80SLPM or less |
Alumina Ceramics |
0.003μm |
FIE-LB19C |
SIE-LB19C |
| 10SLPM or less |
SUS316L |
0.003μm |
FIE-CB13M |
SIE-CB13M |
| 40SLPM or less |
SUS316L |
0.003μm |
FIE-SB13M |
SIE-SB13M |
| 80SLPM or less |
SUS316L |
0.003μm |
FIE-LB13M |
SIE-LB13M |
| 120SLPM or less |
SUS316L |
0.003μm |
FIE-TB19M |
SIE-TB19M |
| H1G-Seal |
10SLPM or less |
Alumina Ceramics |
0.003μm |
FIH-MB10C |
- |
| 40SLPM or less |
Alumina Ceramics |
0.003μm |
FIH-SB19C |
- |
| 80SLPM or less |
Alumina Ceramics |
0.003μm |
FIH-LB19C |
- |
| 10SLPM or less |
SUS316L |
0.003μm |
FIH-CB13M |
- |
| 40SLPM or less |
SUS316L |
0.003μm |
FIH-SB13M |
- |
| 80SLPM or less |
SUS316L |
0.003μm |
FIH-LB13M |
- |
| 120SLPM or less |
SUS316L |
0.003μm |
FIH-TB19M |
- |
| W-Seal |
10SLPM or less |
Alumina Ceramics |
0.003μm |
FIF-MB10C |
SIF-MB10C |
| 40SLPM or less |
Alumina Ceramics |
0.003μm |
FIF-SB19C |
SIF-SB19C |
| 80SLPM or less |
Alumina Ceramics |
0.003μm |
FIF-LB19C |
SIF-LB19C |
| 10SLPM or less |
SUS316L |
0.003μm |
FIF-CB13M |
SIF-CB13M |
| 40SLPM or less |
SUS316L |
0.003μm |
FIF-SB13M |
SIF-SB13M |
| 80SLPM or less |
SUS316L |
0.003μm |
FIF-LB13M |
SIF-LB13M |
| 120SLPM or less |
SUS316L |
0.003μm |
FIF-TB19M |
SIF-TB19M |
▲Back to Top