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Gas Filters for IGS FI/SI Series

  • High Accuracy Filtration
    Ceramic element types (0.003μm) with a reputation for high accuracy filtration and metal element types (0.003μm) lined up.
  • Wide Variation
    C- Seal / H1G-Seal / W- Seal types available (1.125 inch types are also available for C-seal and W-seal).
  • Wide Flow Rate Range
    Product line ups with flow rates from LPM level to 120LPM
Seal TypeRecommended Flow Rate Element Material Filtration Accuracy 1.5" Type 1.125" Type
C-Seal 10SLPM or less Alumina Ceramics 0.003μm FIE-MB10C SIE-MB10C
40SLPM or less Alumina Ceramics 0.003μm FIE-SB19C SIE-SB19C
80SLPM or less Alumina Ceramics 0.003μm FIE-LB19C SIE-LB19C
10SLPM or less SUS316L 0.003μm FIE-CB13M SIE-CB13M
40SLPM or less SUS316L 0.003μm FIE-SB13M SIE-SB13M
80SLPM or less SUS316L 0.003μm FIE-LB13M SIE-LB13M
120SLPM or less SUS316L 0.003μm FIE-TB19M SIE-TB19M
H1G-Seal 10SLPM or less Alumina Ceramics 0.003μm FIH-MB10C -
40SLPM or less Alumina Ceramics 0.003μm FIH-SB19C -
80SLPM or less Alumina Ceramics 0.003μm FIH-LB19C -
10SLPM or less SUS316L 0.003μm FIH-CB13M -
40SLPM or less SUS316L 0.003μm FIH-SB13M -
80SLPM or less SUS316L 0.003μm FIH-LB13M -
120SLPM or less SUS316L 0.003μm FIH-TB19M -
W-Seal 10SLPM or less Alumina Ceramics 0.003μm FIF-MB10C SIF-MB10C
40SLPM or less Alumina Ceramics 0.003μm FIF-SB19C SIF-SB19C
80SLPM or less Alumina Ceramics 0.003μm FIF-LB19C SIF-LB19C
10SLPM or less SUS316L 0.003μm FIF-CB13M SIF-CB13M
40SLPM or less SUS316L 0.003μm FIF-SB13M SIF-SB13M
80SLPM or less SUS316L 0.003μm FIF-LB13M SIF-LB13M
120SLPM or less SUS316L 0.003μm FIF-TB19M SIF-TB19M

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