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Jacket Heater for Gas Filter FBR Series
Jacket heater FBR series for gas filter baking is epochal product baking filter at high temperature of 200°C.
- Easily detachable from filter
- 200°C baking possible
- Safety design with heating-proof interlock and breaking detection in controller unit
- Easy setting of temperature and time etc. by remote controllable digital controller unit
- Space saving thin and light weight heater design.
N2 purge alone is not effective once metallic surface or element in filter absorb water in the air. With H2O or O2 existing in atmosphere, pollution or corrosion is generated by reactive materials in filter or process chamber by reaction with water at room temperature. In order to desorb water or other degas materials, baking at 200°C or higher is most effective. Pureron’s epochal development realized baking filter at 200°C and degas amount (amount of water) at 1.2ppb by APIMS measurement.
| Max. Operating Temperature | 200℃ |
|---|---|
| Power Supply | AC100V |
| Power Consumption | 60W to １00W(0.6A to 1A) |
| Max. Heating Time | 100Hrs(digital setting) |
| Temperature Adjustment | PID control(digital setting) |
| System Configuration | Heater unit and controller unit |
| Accessory | Power supply cord, relay cord |
| Option | Multi channel scan type controller, other option is applicable. |
| Model | External Diameter A(mm) | Internal Diameter B(mm) | Length C(mm) |
|---|---|---|---|
| FBR-2 | 60.0 | 43.0 | 80.0 |
| FBR-3 | 60.0 | 43.0 | 50.0 |
| FBR-5 | 50.0 | 30.0 | 50.0 |
